Leybold Dryvac 100s

This pump was used on a plasma processing tool until 2004/5 when it was decommissioned. It was in perfect working condition at this point, but has not been used since then. I have never used the pump, and cannot power it up easily as I have not got an appropriate 3-phase supply, cooling system etc, so I cannot test it. It has never been exposed to freezing temperatures.

On the input to the pump there is a pneumatic gate valve and a set of bellows. On the output there is an oil trap (I think - see pictures). I also have an older rotary pump (Edwards EDM6) and some diffusion pumps.

If interested contact: hugh@astro.gla.ac.uk or call 0141 330 3816